dI(y)ӑB(ti)
mco늳mc(din)^
mco늳mc(din)^
1. o늳m
a. (yu)c(din)
mЧʸ_(d)99%pʧСw100-200Pa,g(sh)(yng)ÏV
b. ȱc(din)
O(sh)ռeҪ߉ֱԴϵy(tng)һͶYM(fi)øúN׃^УmЧwӰ푴b\(yn)йˮƽҪߡ
2. ܇m
a. (yu)c(din)
mЧʺܸ_(d)99.98%m(yng)(qing)̎ͬ͵weo늳mײĸ߱mЧm(yng)|(zh)ȷٵ׃Ҳһķ(wn)Y(ji)(gu)Σ(ni)o(f)sY(ji)(gu)
b. ȱc(din)
pʧw800-1500Pa
xm
1. ʹÜض
ڴʽmfʹÜضȡQڃɂһǞVϵ߳ܜضڶǚwضȱ¶c(din)ضϡĿǰڲwVϵĴʹÜضȿ_(d)280@һضȵĚw횲ȡشʩ¶c(din)Ĝض횲ȡشʩ
ʽmfʹÜضcmЧP(gun)ϵ@@һc(din)ͬ늳m늳mfضȵ׃Ӱ푵ۉmıӰ푳mЧ
2.m̎L(fng)Q
̎L(fng)ָmچλrg(ni)܃wweλÿСrÿСr(bio)ǴʽmO(sh)Ӌ(j)Ҫ֮һ